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FemtosecondLaser-InducedDamageinDielectricMaterials
Chapter 5
5. Femtosecond Laser-Induced
Damage in Dielectric Materials
Luke A. Emmert and Wolfgang Rudolph
5.1 Introduction
In this chapter, we focus on femtosecond (fs) laser damage in dielectric materials. Fs laser
damage studies of wide bandgap dielectric materials have gained importance for many
practical applications such as laser micromachining and for the development of opti-
cal components for ever more powerful continuous wave (cw) and pulsed lasers. Fs laser
pulses have also been used to mitigate damage pits produced by another laser, which is
particularly important for extending t ...