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Laser-Induced Damage in Optical Materials
edistribution of particles over the sample and the eect of cleaning are clearly visible
by comparing the scatter maps before and aer cleaning.
e TS method is very capable for performing fast and sensitive investigations of sur-
face roughness using Equations 8.9, although this requires separation of the contribu-
tion from surface and bulk scattering in the case of transparent samples. It is also very
useful for detecting local defects on larger areas with high sensitivity. Yet no detailed
information can be obtained about the nature of the defects because of the integral
measurement of scatteri ...