
233Measurement of Light Scattering, Transmittance, and Reectance
Chapter 8
e results of ARS measurements performed at λ = 193nm using the instrumenta-
tion described in Schröder etal. (2008) are shown in Figure 8.12 together with modeling
results using the simplied procedure described in Section 8.3.2.
e measured curves exhibit distinct peaks at 0° corresponding to the direction of
specular reection as well as typical shoulders and ripples caused by interference eects
of waves scattered at dierent interfaces within the coating. e TS
b
calculated using
Equation 8.4 is 2.8%.
e modeling results shown in Figure 8.12a reveal that varying the ...