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Laser-Induced Damage in Optical Materials
Althoughitis strictly a momentum-driven eect, the processes are usually known as
energetic processes. ey are much used in a reactive role where the bombardment
may be by oxygen or nitrogen ions. e ions are positive and cause charge buildup
over dielectric lms. To avoid this eect, electrons are added to the ion beam so as to
neutralize the charge on the growing lm, the beam being termed, rather confusingly,
a neutral ion beam.
A remaining problem, not solved satisfactorily as yet, is that the bombardment inher-
ent in the energetic processes causes a depletion of uorine in the uorides that, ...