May 2018
Intermediate to advanced
480 pages
17h 17m
English
Salvatore Surdo, Alberto Diaspro and Martí Duocastella
Department of Nanophysics, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
The control of inorganic matter into an ever-decreasing size has enabled the technological revolution of the past decades, with developments ranging from computers to medical tools. Arguably, behind these advances lies photolithography, the de facto standard micro/nanofabrication technique [1]. Despite unrivaled results in terms of parallelization, resolution, and feature size, photolithography is highly optimized for a short parameter space, namely few materials (metals or semiconductors) and even fewer substrates (flat silicon or glass). All ...