Low Voltage Electron Microscopy: Principles and Applications

Table of contents

1. Cover
2. Current and future titles in the Royal Microscopical Society- John Wiley Series
3. Title Page
4. Copyright
5. List of Contributors
6. Preface
7. Chapter 1: Introduction to the Theory and Advantages of Low Voltage Electron Microscopy
   1. 1.1 Introduction
   2. 1.2 Historical Perspective
   3. 1.3 Beam Interaction with Specimen—Elastic and Inelastic Scattering
   4. 1.4 Instrument Configuration
   5. 1.5 Influence of Electron Optics Aberrations at Low Voltages
   6. 1.6 SEM Imaging at Low Voltages
   7. 1.7 TEM/STEM Imaging and Analysis at Low Voltages
   8. 1.8 Conclusion
   9. References
8. Chapter 2: SEM Instrumentation Developments for Low kV Imaging and Microanalysis
   1. 2.1 Introduction
   2. 2.2 The Electron Source
   3. 2.3 SEM Column Design Considerations
   4. 2.4 Beam Deceleration
   5. 2.5 Novel Detector Options and Energy Filters
   6. 2.6 Low Voltage STEM in SEM
   7. 2.7 Aberration Correction in SEM
   8. 2.8 Conclusions
   9. References
9. Chapter 3: Extreme High-Resolution (XHR) SEM Using a Beam Monochromator
   1. 3.1 Introduction
   2. 3.2 Limitations in Low Voltage SEM Performance
   3. 3.3 Beam Monochromator Design and Implementation
   4. 3.4 XHR Systems and Applications
   5. 3.5 Conclusions
   6. Acknowledgements
   7. References
10. Chapter 4: The Application of Low-Voltage SEM—From Nanotechnology to Biological Research
    1. 4.1 Introduction
    2. 4.2 Specimen Preparation Considerations
    3. 4.3 Nanomaterials Applications
    4. 4.4 Beam Sensitive Materials
    5. 4.5 Semiconductor Materials
    6. 4.6 Biological Specimens
    7. 4.7 Low-Voltage Microanalysis
    8. 4.8 Conclusions
    9. References
11. Chapter 5: Low Voltage High-Resolution Transmission Electron Microscopy
    1. 5.1 Introduction
    2. 5.2 So How Low is Low?
    3. 5.3 The Effect of Chromatic Aberration and Chromatic Aberration Correction
    4. 5.4 The Electron Monochromator
    5. 5.5 Theoretical Tradeoffs of Low kV Imaging
    6. 5.6 Our Experience at 40 keV LV-HREM
    7. 5.7 Examples of LV-HREM Imaging
    8. 5.8 Conclusions
    9. References
12. Chapter 6: Gentle STEM of Single Atoms: Low keV Imaging and Analysis at Ultimate Detection Limits
    1. 6.1 Introduction
    2. 6.2 Optimizing STEM Resolution and Probe Current at Low Primary Energies
    3. 6.3 STEM Image Formation
    4. 6.4 Gentle STEM Applications
    5. 6.5 Discussion
    6. 6.6 Conclusion
    7. Acknowledgements
    8. References
13. Chapter 7: Low Voltage Scanning Transmission Electron Microscopy of Oxide Interfaces
    1. 7.1 Introduction
    2. 7.2 Methods and Instrumentation
    3. 7.3 Low Voltage Imaging and Spectroscopy
    4. 7.4 Summary
    5. Acknowledgements
    6. References
14. Chapter 8: What's Next? The Future Directions in Low Voltage Electron Microscopy
    1. 8.1 Introduction
    2. 8.2 Unique Low Voltage SEM and TEM Instruments
    3. 8.3 Cameras, Detectors, and Other Accessories
    4. 8.4 Conclusions
    5. References
15. Index