Chapter 10 Characterization of Thin Films and Surfaces


Scientific disciplines are identified and differentiated by the experimental equipment and measurement techniques they employ. The same is true of thin-film science and technology. For the first half of this century interest in thin films centered on optical applications. The role played by films was largely a utilitarian one necessitating measurement of film thickness and optical properties. At first single films on thick substrates were involved. However, with the explosive growth of thin-film utilization in microelectronics there was an important need to understand the intrinsic nature of films in more complex materials environments. Increasingly, the benefits of multilayer ...

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