Index

A

Abrupt interface, 767
Absorption
coefficient, 569
of a photon, 447
Accelerated ion-assisted etching, 238
AC effects in plasmas, 160–161
AC sputtering. See Sputtering, AC (RF)
Activeated reactive evaporation (ARE), 256–258
Adatom arrays, crystallography of, 367–370
Adhesion
defined, 764
film-substrate interfaces, 767–768
metal-metal, 766–767
metal oxide, 767
methods for improving, 769–772
tests, 772–775
views of, 765–766
Adsorption
Gibbs, 666
reactions on solid surfaces, 373–376
Ag, nucleation and, 406–408
Alloys
evaporation of, 103–105
interdiffusion in miscible, 662–667
sputtering of, 180–181
Aluminum
graphoepitaxy and, 422–423
tensile strength, 722
Al-Au, compound ...

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