Materials Science of Thin Films, 2nd Edition

Index

A

Abrupt interface, 767

Absorption

coefficient, 569

of a photon, 447

Accelerated ion-assisted etching, 238

AC effects in plasmas, 160–161

AC sputtering. See Sputtering, AC (RF)

Activeated reactive evaporation (ARE), 256–258

Adatom arrays, crystallography of, 367–370

Adhesion

defined, 764

film-substrate interfaces, 767–768

metal-metal, 766–767

metal oxide, 767

methods for improving, 769–772

tests, 772–775

views of, 765–766

Adsorption

Gibbs, 666

reactions on solid surfaces, 373–376

AES. See Auger electron spectroscopy

Ag, nucleation and, 406–408

Alloys

evaporation of, 103–105

interdiffusion in miscible, 662–667

sputtering of, 180–181

Aluminum

graphoepitaxy and, 422–423

tensile strength, 722

Al-Au, compound ...