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Measurement and Monitoring by Anthony Hope, Vytautas Giniotis

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Chapter 4

Control of Nano-Displacement and Position

The importance of accuracy control of the position and displacement of machine parts is discussed. A variety of touch probes for measuring the surface of the part are described including multidirectional measuring heads used with coordinate measuring machines (CMMs). The operating principles of high-accuracy interferometric measuring devices for measuring small gaps and distances between two surfaces are then described together with similar techniques for measuring small angular rotations.

The chapter concludes by discussing the application of linear and circular piezoelectric actuators for nanometric displacement. A mechatronic test bench is described which includes the implementation of ...

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