
26-11Electrical Conductivity and Resistivity
TABLE 26.1 (continued) Companies at Make Four-Point Resistivity Measurement Probes and Systems
Company and Comments
KLA-Tencor Corp.
1
T
echnology
Dr
ive
Milpitas, CA 95035
Tel:
(408) 875-3000
F
ax:
(408) 875-3030
h
ttp://www
.k
la-tencor
.co
m
KLA-Tencor
m
akes
a
utomated
s
heet
r
esistance
m
apping
sys
tems
desig
ned
f
or
s
emiconductor
wa
fers
Lucas-Signatone Corp.
393-J
T
omkins
C
t
.
Gi
lroy,
CA 95020
T
el:
(408) 848-2851
F
ax:
(408) 848-5763
h
ttp://www
.sig
natone
.co
m
Signatone
m
akes
f
our-point
r
esistivity
m
easurement
sys
tems
a
nd
a va
riety
o
f
f
our-point
p
robe
h
eads
.
ey
m
ake
a
high-t
emperature,
f
our-point
p
robe
h
ead
f
or
t
emperat