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Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition
book

Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition

by John G. Webster, Halit Eren
February 2014
Intermediate to advanced content levelIntermediate to advanced
1921 pages
82h 13m
English
CRC Press
Content preview from Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition
49-16 Optical
designing anexperiment. e simplest ellipsometer is a PSA ellipsometer. A more general one is a PCSA
ellipsometer. Figure 49.6 shows a schematic diagram of a PCSA reection ellipsometer. A PSA system
ca
n
b
e
v
isualized
b
y
r
emoving
t
he
c
ompensator
C i
n
F
igure
4
9
.6.
Le
t
th
e
or
iented
an
gles
of th
e
po
larizer
an
d
an
alyzer
be P an
d
A, re
spectively,
as me
asured
fr
om
th
e
pl
ane
of in
cidence
. Fo
r
un
polarized
in
cident
li
ght
an
d
a sa
mple
ma
trix
M gi
ven
by Eq
uation
49.21
,
th
e
me
asured
i
ntensity
I f
or
a P
SA
e
llipsometer
i
s
[
22]
I P A A R P
T T RI P A
p a
( , ) ( ) ( , , ) ( )
[ cos (cos cos )] c
=
= + +
IA M P S
ψ
ψ
0
1 2 2 2 oos cos sin cos sin sin ...
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Publisher Resources

ISBN: 9781439848913