
49-16 Optical
designing anexperiment. e simplest ellipsometer is a PSA ellipsometer. A more general one is a PCSA
ellipsometer. Figure 49.6 shows a schematic diagram of a PCSA reection ellipsometer. A PSA system
ca
n
b
e
v
isualized
b
y
r
emoving
t
he
c
ompensator
C i
n
F
igure
4
9
.6.
Le
t
th
e
or
iented
an
gles
of th
e
po
larizer
an
d
an
alyzer
be P an
d
A, re
spectively,
as me
asured
fr
om
th
e
pl
ane
of in
cidence
. Fo
r
un
polarized
in
cident
li
ght
an
d
a sa
mple
ma
trix
M gi
ven
by Eq
uation
49.21
,
th
e
me
asured
i
ntensity
I f
or
a P
SA
e
llipsometer
i
s
[
22]
I P A A R P
T T RI P A
p a
( , ) ( ) ( , , ) ( )
[ cos (cos cos )] c
= ∆
= − + +
IA M P S
ψ
ψ
0
1 2 2 2 oos cos sin cos sin sin ...