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Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition
book

Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition

by John G. Webster, Halit Eren
February 2014
Intermediate to advanced content levelIntermediate to advanced
1921 pages
82h 13m
English
CRC Press
Content preview from Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition
7-16 Sensors and Sensor Technology
TABLE 7.4 Materials and Devices Necessary for Needle-Type Environmental MEMS Sensor Array Fabrication
Item Use Description Sources
Borosilicate
g
lass
wa
fer
Co
re
s
tructure
ma
terial
f
or
w
orking
ele
ctrode
175 μ
m
t
hick,
45 mm ×
50 mm
• Erie S
cientic,
Pi
ttsburgh,
P
A
Dicing
s
aw
Cu
t
in
dividual
g
lass
pr
obes
45 μ
m
di
amond
g
rit
resin
oid
b
lades
(Micr
oSwiss)
K&S (740)
P
rogrammable box furnace Anneal glass wafers to
relieve stress from the
dicing process
• Use cooling steps to
re
duce
t
hermal
s
hock
• Programmable target
temperature and hold
time
• Reliable uniform
tem
perature
in
side
fur
nace
• ermo Scientic,
Norwood, ...
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Publisher Resources

ISBN: 9781439848913