
9-1
is chapter provides a comprehensive discussion on the necessity and importance of developing gas
sensors on a low-cost complementary metal oxide semiconductor (CMOS) platform technology. e
ma
in
fo
cus
is on th
e
ch
allenges
of in
tegrating
mi
crohotplate-based
ga
s
se
nsors
in
to
a st
andard
CM
OS
pr
ocess:
mi
crohotplate-based
se
nsors
ty
pically
op
erate
at mu
ch
hi
gher
te
mperatures
of 20
0
°C
–500
°C.
i
s
is be
yond
th
e
no
rmal
li
mit
of CM
OS
op
eration
at +1
25
°C. e ch
apter
fo
cuses
on bo
th
di
erent
on
-chip
ci
rcuit
sc
hemes
to in
terface
th
ese
mi
crohotplate-based
se
nsors
an
d
al
so
th
e
ch
allenges
as
soci-
ated with depositing/growing nanosensing materials (pa ...