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Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition
book

Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition

by John G. Webster, Halit Eren
February 2014
Intermediate to advanced content levelIntermediate to advanced
1921 pages
82h 13m
English
CRC Press
Content preview from Measurement, Instrumentation, and Sensors Handbook, Second Edition, 2nd Edition
9-1
is chapter provides a comprehensive discussion on the necessity and importance of developing gas
sensors on a low-cost complementary metal oxide semiconductor (CMOS) platform technology. e
ma
in
fo
cus
is on th
e
ch
allenges
of in
tegrating
mi
crohotplate-based
ga
s
se
nsors
in
to
a st
andard
CM
OS
pr
ocess:
mi
crohotplate-based
se
nsors
ty
pically
op
erate
at mu
ch
hi
gher
te
mperatures
of 20
0
°C
–500
°C.
i
s
is be
yond
th
e
no
rmal
li
mit
of CM
OS
op
eration
at +1
25
°C. e ch
apter
fo
cuses
on bo
th
di
erent
on
-chip
ci
rcuit
sc
hemes
to in
terface
th
ese
mi
crohotplate-based
se
nsors
an
d
al
so
th
e
ch
allenges
as
soci-
ated with depositing/growing nanosensing materials (pa ...
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Publisher Resources

ISBN: 9781439848913