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Planar micromanipulation on microconveyor platforms: recent developments

Panos Lazarou and Nikos A. Aspragathos

Abstract:

Nowadays microcomponents are fabricated in very large quantities, whereas their automatic sorting, transportation and alignment in order to assemble the final MEMS products are still lacking in efficiency, thereby bottlenecking production. This chapter highlights recent developments in planar manipulation of microparts with the usage of microconveyor platforms instead of robotic grippers or automated manipulation systems. A classification of the various actuator types is made based on their input energy and a variety of existing platforms or promising implementations are presented. With certain design and performance ...

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