Solid-state chemical and gas sensors are becoming increasingly necessary in today’s global climate to detect malicious release of poisonous or toxic substances present in the atmosphere. Personal safety issues in both industry and residential environments demand highly sensitive detection of gases such as COx, NOx and NH3.
The advantages of an all-solid-state gas detection system are low power consumption, integration with existing circuitry and miniaturization. Microelectromechanical systems (MEMS) technology has allowed for the integration of the gas sensor, heating element and temperature sensor on a standard Si wafer with easy integration into standard complementary metal oxide semiconductor ...
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