
Engineering applications 305
This strain will induce a nonlinear force that imposes on the free end of
the beam.
Figure7.12 presents the curve of the tilt angle and the applied voltage.
Note that the tilt angle of the mirror increases with the increase of the
applied voltage, and the increase is nonlinear. Table7.1 lists the peak deec-
tion, tilt angle, and mirror strain at different voltages. We can conclude
from the table that the demand for the different tilt angle of the mirror can
be satised by changing the applied voltage.
0 10 20 30 40 50 60 70 80 90
0
5
10
15
20
25
Tilt Angle (º)
Applied Voltage (volt)
Figure 7.12 Relationship of tilt ang ...