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Microfabrication and Precision Engineering

Book Description

Microfabrication and precision engineering is an increasingly important area relating to metallic, polymers, ceramics, composites, biomaterials and complex materials. Micro-electro-mechanical-systems (MEMS) emphasize miniaturization in both electronic and mechanical components. Microsystem products may be classified by application, and have been applied to a variety of fields, including medical, automotive, aerospace and alternative energy. Microsystems technology refers to the products as well as the fabrication technologies used in production.

With detailed information on modelling of micro and nano-scale cutting, as well as innovative machining strategies involved in microelectrochemical applications, microchannel fabrication, as well as underwater pulsed Laser beam cutting, among other techniques, Microfabrication and Precision Engineering is a valuable reference for students, researchers and professionals in the microfabrication and precision engineering fields.

  • Contains contributions by top industry experts
  • Includes the latest techniques and strategies
  • Special emphasis given to state-of-the art research and development in microfabrication and precision engineering

Table of Contents

  1. Cover image
  2. Title page
  3. Table of Contents
  4. Copyright
  5. List of contributors
  6. About the editor
  7. Preface
  8. 1. Modeling of micro- and nano-scale cutting
    1. Abstract
    2. 1.1 Introduction
    3. 1.2 Modeling of microscale cutting
    4. 1.3 Modeling of nanoscale cutting
    5. Conclusions
    6. References
  9. 2. Machining scale: Workpiece grain size and surface integrity in micro end milling
    1. Abstract
    2. 2.1 Introduction
    3. 2.2 Specific cutting energy
    4. 2.3 Size effect
    5. 2.4 Workpiece microstructure scale
    6. 2.5 Surface integrity
    7. References
  10. 3. Micromachining technique based on the orbital motion of the diamond tip
    1. Abstract
    2. 3.1 Introduction
    3. 3.2 Principle of micromachining using the orbital motion of the diamond tip
    4. 3.3 Micromachining setup and test of the stage’s trajectory
    5. 3.4 Micromachining mechanism using the orbital motion of the tip
    6. 3.5 Formation mechanism and control methods of burrs
    7. 3.6 Effects of the processing parameters and fabrication of microstructures
    8. 3.7 Summary and future works
    9. Acknowledgments
    10. References
  11. 4. Microelectrical discharge machining of Ti-6Al-4V: Implementation of innovative machining strategies
    1. Abstract
    2. 4.1 Introduction
    3. 4.2 Principle of electrical discharge machining
    4. 4.3 Overview of micro-EDM
    5. 4.4 Differences between EDM and micro-EDM
    6. 4.5 System components of micro-EDM
    7. 4.6 Micro-EDM process parameters
    8. 4.7 Performance criteria in micro-EDM
    9. 4.8 Titanium alloys as advanced engineering materials
    10. 4.9 Literature review of micro-EDM of Ti-6Al-4V
    11. 4.10 Investigation of micro-EDM process employing innovative machining strategies
    12. Conclusions
    13. Acknowledgements
    14. References
  12. 5. Microelectrochemical machining: Principle and capabilities
    1. Abstract
    2. 5.1 Fundamentals of microelectrochemical machining
    3. 5.2 Variety of micro-ECM processes
    4. 5.3 Hybrid processes associated with microelectrochemical machining
    5. 5.4 Conclusions
    6. Acknowledgment
    7. References
  13. 6. Microchannel fabrication via direct laser writing
    1. Abstract
    2. 6.1 Introduction
    3. 6.2 Important materials for MEMS and microfluidic devices
    4. 6.3 Lasers for microfabrication
    5. 6.4 Material removal mechanisms
    6. 6.5 Laser microprocessing of materials
    7. 6.6 Challenges and future of laser processing
    8. References
  14. 7. Underwater pulsed laser beam cutting with a case study
    1. Abstract
    2. 7.1 Introduction
    3. 7.2 Laser as a machine tool
    4. 7.3 Laser material interaction
    5. 7.4 Laser beam cutting
    6. 7.5 Underwater laser beam machining
    7. 7.6 Pulsed IR laser ablation of Inconel 625 superalloy at submerged condition: A case study
    8. Conclusion
    9. Acknowledgment
    10. References
  15. 8. Glass molding process for microstructures
    1. Abstract
    2. 8.1 Application of microstructures
    3. 8.2 Fundamental of glass molding technique
    4. 8.3 Modeling and simulation of microstructure molding
    5. 8.4 Glass molding process for microstructures
    6. 8.5 Summary
    7. References
  16. Index