Chapter Seven

Micromachining processes

Abstract

Removing the surplus material and attaining desired shape, size as well as to create intricate feature is the sole aim of today’s micro manufacturing technologies. Hence, micromachining technologies utilizes various material removal mechanisms to fabricate micro features as well as formed surfaces in micron/sub micron dimensions. In the recent past, the utilization of different micromachining techniques has become popular to fulfill the various needs of micro manufacturing. It includes different micromachining methods which utilize energies, e.g., mechanical, thermal, chemical and electrochemical micromachining. Detail discussion on micro-USM, micro-EDM, micro-LBM, micro-ECM have been highlighted. ...

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