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Nanoelectronic Device Applications Handbook by Krzysztof Iniewski, James E. Morris

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7

Package-Compatible High-Density Nano-Scale Capacitors with Conformal Nano-Dielectrics

Himani Sharma, P. Markondeya Raj, Parthasarathi Chakraborti, Yushu Wang and Rao Tummala

CONTENTS

7.1  Introduction

7.2  Etched-Foil Nanocapacitors

7.3  Silicon Trench Capacitors

7.4  Particulate Capacitors

7.5  Conclusions

References

7.1    INTRODUCTION

Passive components support key electrical functions in any electronic system. They constitute ~80% of all components [1] and take up to ~50% of the printed wiring board area [2]. They, therefore, substantially influence the size, cost, and performance of the electronic system as a whole. Capacitors (C) are the most challenging among all the passives (R, L, and C). They perform a multitude of important ...

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