Nanoelectronic Device Applications Handbook

13	Simultaneously Controlled Tuning of Tunneling Properties of Integrated Nanogaps Using Field-Emission-Induced Electromigration Mitsuki Ito, Shunsuke Akimoto, Ryutaro Suda and Jun-Ichi Shirakashi

CONTENTS

13.1  Introduction

13.2  Experimental Details

13.2.1  Activation Procedure for Series-Connected Nanogaps

13.3  Results and Discussion

13.3.1  Tuning of Structural and Electrical Properties of Integrated Nanogaps by Activation

13.3.2  Integration of SETs Using Activation

13.4  Conclusion

References

13.1  INTRODUCTION

The fabrication of large-scale, reproducible nanogap electrodes is a key issue for the integration of nanoscale devices such as single-electron transistors (SETs). SETs have been studied extensively because of their potential ...