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Nanoelectronic Device Applications Handbook by Krzysztof Iniewski, James E. Morris

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37

Electrical Control of Synthesis Conditions for Locally Grown CNTs on a Polysilicon Microstructure

Knut E. Aasmundtveit, Bao Quoc Ta, Nils Hoivik and Einar Halvorsen

CONTENTS

37.1  Introduction

37.2  Methodology

37.3  Characterization of CNT Growth Structure

37.3.1  Calculation and Simulation

37.3.2  Experimental Characterization

37.4  Results and Discussion

37.5  Outlook and Potential Industrial Implementation

37.6  Conclusion

Acknowledgments

References

37.1  INTRODUCTION

The integration of carbon nanotubes (CNTs) with micro-electromechanical systems (MEMS) or nano-electromechanical systems (NEMS) has attracted increasing interest over the last decade [1, 2, 3, 4, 5, 6 and 7]. Recent semiconductor advancements further demonstrate the ...

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