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Nanoelectronic Device Applications Handbook by Krzysztof Iniewski, James E. Morris

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54

High-Speed and Transparent Nanocrystalline ZnO Thin Film Transistors

Burhan Bayraktaroglu and Kevin Leedy

CONTENTS

54.1  Introduction

54.2  Thin Film Deposition and Device Fabrication

54.3  ZnO Thin Films

54.3.1  Thin Film Analysis

54.3.2  Influence of Growth Temperature

54.4  Thin Film Transistors

54.4.1  DC Characteristics

54.4.2  High-Speed Transistors

54.4.3  Transparent Transistors

54.5  Summary and Conclusions

Acknowledgments

References

54.1  INTRODUCTION

Thin film transistors (TFTs) made from amorphous or organic semiconductors are commonly used in the control circuits of large-area display electronics such as flat-panel TV screens. They can also be used in applications requiring flexible or nonplanar surfaces where the use of ...

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