Skip to Main Content
Nanosensors
book

Nanosensors

by Vinod Kumar Khanna
April 2016
Intermediate to advanced content levelIntermediate to advanced
666 pages
22h 57m
English
CRC Press
Content preview from Nanosensors
163Nanosensor Laboratory
regime). It is one among the best established, celebrated models in silicon
processing.
According to the Deal–Grove model, the thickness of thermal oxide is
expressed as
t
A t
A B
ox
=
+
+
2
1
4
1
2
τ
( )
(3.4)
where
B/A is linear rate constant
B is parabolic rate constant
τ denotes a shift in the time coordinate to account for the presence of the
initial oxide layer
Example 3.1
Wet oxidation of silicon is carried out at 1000°C. Given the follow-
ing values of parameters in the Deal–Grove model: A = 0.226 m,
B = 0.287 m
2
h
−1
, and τ = 0, nd the oxide thickness for growth times
t = 0.01 h and ...
Become an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
and much more.
Start your free trial

You might also like

Nanocomposites

Nanocomposites

Jinbo Bai
Optochemical Nanosensors

Optochemical Nanosensors

Andrea Cusano, Francisco J. Arregui, Michele Giordano, Antonello Cutolo
Electrothermics

Electrothermics

Javad Fouladgar
Biomaterials

Biomaterials

Brian J. Love

Publisher Resources

ISBN: 9781439827130