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Nanosensors
book

Nanosensors

by Vinod Kumar Khanna
April 2016
Intermediate to advanced content levelIntermediate to advanced
666 pages
22h 57m
English
CRC Press
Content preview from Nanosensors
193Nanosensor Laboratory
control over etching prole vis-à-vis equipment cost, installation, mainte-
nance, and infrastructural expenses are prime considerations. Anisotropic
wet etching of <100> silicon is an established technique that has been widely
used for realization of microstructures. The use of dry etching is restricted
by prohibitively high cost to specialized applications where other methods
are inadequate. Dry etching is a high-precision and controlled process but
also high-cost-enabling technology.
Under what circumstances, is dry etching essential? If feature resolution in thin
lm structures is of primary concern, or vertical sidewalls are needed for
deep etchings in the substrate, dry etching must be irresistibly done. Under ...
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Publisher Resources

ISBN: 9781439827130