
224 Nanosensors: Physical, Chemical, and Biological
components. For ultrasensitive mass detection, silicon micro-electrome-
chanical system (MEMS)-based micro-resonator is better than QCM sensor
because of (i) its advantage of having a much smaller minimum detectable
mass limit by several orders of magnitude. (ii) Apart from this, MEMS-based
micro-resonators exhibit better exibility in device design and fabrication
for various kinds of specimens, and (iii) offer better integration capability
with other MEMS components and complementary metal-oxide semicon-
ductor (CMOS) circuits.
Nanoelectromechanical systems (NEMS) have provided ...