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Nanosensors
book

Nanosensors

by Vinod Kumar Khanna
April 2016
Intermediate to advanced content levelIntermediate to advanced
666 pages
22h 57m
English
CRC Press
Content preview from Nanosensors
229Mechanical Nanosensors
How is a cantilever beam actuated for oscillations and how is its resonance fre-
quency measured?
1. In magnetomotive motion actuation, the Lorentz force generated upon
a current-carrying conductor in a static magnetic eld supplies the
actuation force. Here, an AC current is driven through the beam in
the presence of a strong magnetic eld.
2. In electrostatic (capacitive) motion actuation, a gate electrode is fabri-
cated in the vicinity of the beam and a voltage is applied between
the gate electrode and the device. The actuation force depends non-
linearly upon the excitation voltage and has components present at
higher harmonics. To obtain a large contribution at the drive fre-
quency, a voltage having a large
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Publisher Resources

ISBN: 9781439827130