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Nanosensors
book

Nanosensors

by Vinod Kumar Khanna
April 2016
Intermediate to advanced content levelIntermediate to advanced
666 pages
22h 57m
English
CRC Press
Content preview from Nanosensors
249Mechanical Nanosensors
for high sensitivity, requires pushing against the ultimate resolution lim-
its of lithography and nanofabrication processes. Flexural (a curve, turn, or
fold) mechanical resonance frequencies for beams directly depend upon
the ratio (E/ρ). The ratio of Young’s modulus, E, to mass density, ρ, for SiC
is drastically higher than for other commonly used semiconducting mate-
rials for electromechanical devices, e.g., Si and GaAs. SiC, given its larger
(E/ρ), yields devices that operate at tremendously higher frequencies for a
given geometry, than otherwise possible using conventional materials. (ii)
For NEMS the
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Publisher Resources

ISBN: 9781439827130