Skip to Main Content
Nanosensors
book

Nanosensors

by Vinod Kumar Khanna
April 2016
Intermediate to advanced content levelIntermediate to advanced
666 pages
22h 57m
English
CRC Press
Content preview from Nanosensors
259Mechanical Nanosensors
Piezoresistive sensing is realized by detecting the resistance changes through
a piezoresistive NEMS device upon actuation (Ekinci 2005). There are, how-
ever, some obstacles in this method, e.g., in a P-type Si doubly clamped
beam, an optimistic estimate for the resistance change ΔR, as a function of
the displacement, the beam length l, and the resistance R, is ΔR/R ∼ x
2
/l
2
,
indicating that ΔR
max
/R ∼ 1/100. In view of the already high resistance of a
doped semiconductor beam approaching R ∼ 10 kΩ, such a small resistance
change is likely to be obscured at high resonance frequencies by the inescap-
ably a ...
Become an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
and much more.
Start your free trial

You might also like

Nanocomposites

Nanocomposites

Jinbo Bai
Optochemical Nanosensors

Optochemical Nanosensors

Andrea Cusano, Francisco J. Arregui, Michele Giordano, Antonello Cutolo
Electrothermics

Electrothermics

Javad Fouladgar
Biomaterials

Biomaterials

Brian J. Love

Publisher Resources

ISBN: 9781439827130