
274 Nanosensors: Physical, Chemical, and Biological
superior than the capacitive one. In other words, the tunneling
sensor technology results in an improvement of signal response
by 7.7 × 10
5
times. The 6.485 × 10
−4
Å deection of tunneling
accelerometer refers to an acceleration of 1/(7.7 × 10
5
) = 1.299 ×
10
−6
g = 1.299 μg.
4.14 NEMS Accelerometer
NEMS devices can be generally dened as devices fabricated by micro-
technologies and including at least one movable mechanical part with
dimension <100 nm. Ollier et al. (2006) designed two congurations: in-plane
(IP) accelerometers with sensitive axis included in the plane ...