
322 Nanosensors: Physical, Chemical, and Biological
How is the temperature of the sample determined? It is measured with the
help of three sample thermometers (two a-Nb
y
Si
1−y
and one Pt) located on
the sample area with impedance-matched thermometers on the frame. The
resistance of each thermometer is optimized for a different temperature
range. Lead resistances are <2% of the measured resistance for the heater
and over the range of each thermometer. The Pt heater and thermometer are
12 μm wide. The a-Nb
y
Si
1−y
thermometers have the same doping y and resis-
tances that differ by a factor of 12.5 due to geometry.
How is the he ...