Chapter 17. Bio-Nano-Information Fusion
Chih-Ming Ho, Dean Ho, and Dan Garcia
The solid-state microelectronics industry started in the late 1940s and has been the main driving force of the U.S. economy in the past few decades. In the 1980s, microelectromechanical systems (MEMS) technology demonstrated the capability of fabricating mechanical devices at a scale far smaller than those made of traditional machining processes. Fan, Tai, and Muller (1988) developed a micromotor that was on the order of 100μm by using the MEMS fabrication process, which was derived from the integrated circuit (IC) industry.
Further reduction of the scale into the nanoscale has enabled the fusion between nanotechnology and biology. By working on the same scale as that ...
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