CONTENTS
10.2 State of the Art of MEMS Microphones
10.2.1 Contribution of MEMS Technology
10.2.2 Different Principles of Micromachined Microphones
10.2.2.1 Piezoresistive Micromachined Microphones
10.2.2.2 Piezoelectric Micromachined Microphones
10.2.2.3 Capacitive Micromachined Microphones
10.2.2.4 Optical Micromachined Microphones
10.3 Electrodynamic Microphone Design
10.3.1 Principle of Electrodynamic Linkage
10.3.2 Structure of the Electrodynamic Microphone
10.4 Fundamental Relationships in Transformers
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