
resonant modulator fabricated in fully compliant CMOS foundry manufacture,
with bandwidths sufficient for 10 Gb/s operation [54].
11.7 GERMANIUM PHOTODETECTORS AND
PHOTORECEIVERS FOR INTEG RATED
SILICON PHOTONICS
The ability to convert optical signals to electrical signals is a key function that
must be achieved in nearly every optical system. However, while an SOI CMOS
process offers convenient materials for optical waveguides and a variety of
modulation techniques, it is missing a means to create efficient photodetectors.
Thus, there is a broad interest in integration of germani um photodetectors into a
CMOS process. This section will first focus