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Plasma Engineering by Isak Beilis, Michael Keidar

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Preface

Plasma science and applications have been seeing great progress over the last few decades. This progress is the consequence of development of modern plasma sources based on plasma generation in electrical discharges in vacuum, in low- and high-pressure gases, RF-discharges, magnetrons, etc. On the other hand, it is the result of novel plasma applications in plasma processing of materials, in space propulsion and, especially, in plasma-based nano- and biomedical technology. An important characteristic of the plasma research realm is the strong overlap between plasma science, technology, and application. This interplay of the plasma science, technology, and application is referred as the plasma engineering.

This book is an attempt to ...

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