Plasma Processing of Nanomaterials

Table of contents

1. Cover
2. Half Title
3. Title Page
4. Copyright Page
5. Table of Contents
6. Preface
7. Contributors
8. 1 Nanoscale Etching and Deposition
9. 2 Extreme Ultraviolet Light Lithography for Producing Nanofeatures in Next-Generation Semiconductor Processing
10. 3 Nonthermal Plasma Synthesis of Semiconductor Nanocrystals
11. 4 Microscale Plasmas for Metal and Metal Oxide Nanoparticle Synthesis
12. 5 Large-Scale, Plasma-Assisted Growth of Nanowires
13. 6 Cathodic Arc Discharge for Synthesis of Carbon Nanoparticles
14. 7 Atmospheric Plasmas for Carbon Nanotubes (CNTs)
15. 8 Structural Control of Single-Walled Carbon Nanotubes by Plasma Chemical Vapor Deposition
16. 9 Graphene Growth by Plasma-Enhanced Chemical Vapor Deposition (PECVD)
17. 10 Modeling Aspects of Plasma-Enhanced Chemical Vapor Deposition of Carbon-Based Materials
18. 11 Modeling Catalytic Growth of One-Dimensional Nanostructures
19. 12 Diagnostics of Energy Fluxes in Dusty Plasmas
20. 13 Selective Functionalization and Modification of Carbon Nanomaterials by Plasma Techniques
21. 14 Plasma–Liquid Interactions for Fabrication of Nanobiomaterials
22. 15 Assembly and Self-Organization of Nanomaterials
23. Index