December 2017
Intermediate to advanced
430 pages
13h 44m
English
Nanoscale Etching and Deposition
CONTENTS
1.2 Bottom-up versus Top-down—Comparing Two Approaches
1.3 Introduction to Plasma Science
1.4 Overcoming Damage Issues—Neutral Beams and Atomic Layer Etching
1.5 Lithography Limits and Possible Solutions
1.1 Introduction
The vast potential utility offered by nanoscale assemblies and structures due to their remarkable physical, chemical, electrical, and biological properties has led to a burgeoning body of work in recent years.1 Currently, there are many examples of functional electronic and magnetic devices based on these structures, and nano-array fabrication is also finding ...