Plasma Processing of Nanomaterials

1

Nanoscale Etching and Deposition

Nathan Marchack

Jane P. Chang

CONTENTS

1.1    Introduction

1.2    Bottom-up versus Top-down—Comparing Two Approaches

1.3    Introduction to Plasma Science

1.4    Overcoming Damage Issues—Neutral Beams and Atomic Layer Etching

1.5    Lithography Limits and Possible Solutions

1.6    Plasma in other Roles?

1.7    Conclusion

References

1.1    Introduction

The vast potential utility offered by nanoscale assemblies and structures due to their remarkable physical, chemical, electrical, and biological properties has led to a burgeoning body of work in recent years.¹ Currently, there are many examples of functional electronic and magnetic devices based on these structures, and nano-array fabrication is also finding ...