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Plasma Processing of Nanomaterials
book

Plasma Processing of Nanomaterials

by R. Mohan Sankaran
December 2017
Intermediate to advanced content levelIntermediate to advanced
430 pages
13h 44m
English
CRC Press
Content preview from Plasma Processing of Nanomaterials

1

Nanoscale Etching and Deposition

Nathan Marchack

Jane P. Chang

CONTENTS

1.1    Introduction

1.2    Bottom-up versus Top-down—Comparing Two Approaches

1.3    Introduction to Plasma Science

1.4    Overcoming Damage Issues—Neutral Beams and Atomic Layer Etching

1.5    Lithography Limits and Possible Solutions

1.6    Plasma in other Roles?

1.7    Conclusion

References

1.1    Introduction

The vast potential utility offered by nanoscale assemblies and structures due to their remarkable physical, chemical, electrical, and biological properties has led to a burgeoning body of work in recent years.1 Currently, there are many examples of functional electronic and magnetic devices based on these structures, and nano-array fabrication is also finding ...

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Publisher Resources

ISBN: 9781439866771