Plasma Processing of Nanomaterials

3

Nonthermal Plasma Synthesis of Semiconductor Nanocrystals

Uwe Kortshagen

Lorenzo Mangolini

CONTENTS

3.1    Introduction

3.2    Mechanisms Controlling the Nucleation and Growth of Particles in Plasmas

3.2.1    Nanoparticle Nucleation in Nonthermal Plasmas

3.2.2    Nanoparticle Charging

3.2.3    Nanoparticle Heating in Plasmas

3.3    Nonthermal Plasma Synthesis of Nanocrystals with Controlled Properties

3.3.1    Nanocrystal Synthesis

3.3.2    Nanocrystal Doping

3.3.3    Plasma Surface Treatment and Functionalization of Nanocrystals

3.4    Development of Devices Based on Plasma-Produced Nanocrystals

3.5    Conclusions

Acknowledgments

References

3.1    Introduction

Nonthermal plasmas are a common fabrication tool in the semiconductor industry. ...