Plasma Processing of Nanomaterials

5

Large-Scale, Plasma-Assisted Growth of Nanowires

Uros Cvelbar

Mahendra K. Sunkara

CONTENTS

5.1    Introduction

5.2    Plasma-Enhanced Vapor-Liquid-Solid Growth of Nanowires

5.2.1    Plasma-Enhanced Vapor-Liquid-Solid (VLS) Growth of Silicon and Germanium Nanowires Using Noncatalytic Metals

5.2.2    Plasma-Enhanced VLS Growth of Silicon Oxide and Nitride Nanowires

5.2.3    Plasma-Enhanced VLS Growth of Si and Ge Alloy Nanowires

5.3    Oxide Nanowires

5.3.1    Fast Plasma Routes for Synthesis

5.3.1.1    Plasma-Enhanced Chemical Vapor Deposition

5.3.1.2    Plasma-Catalyst Assisted

5.3.1.3    Plasma Flight-Through Method

5.3.1.4    Direct Plasma Synthesis

5.3.1.5    Mixed Plasma Routes

5.3.2    Parameters for Large-Scale Synthesis of NWs

5.3.2.1    Time ...