Large-Scale, Plasma-Assisted Growth of Nanowires
CONTENTS
5.2 Plasma-Enhanced Vapor-Liquid-Solid Growth of Nanowires
5.2.2 Plasma-Enhanced VLS Growth of Silicon Oxide and Nitride Nanowires
5.2.3 Plasma-Enhanced VLS Growth of Si and Ge Alloy Nanowires
5.3.1 Fast Plasma Routes for Synthesis
5.3.1.1 Plasma-Enhanced Chemical Vapor Deposition
5.3.1.2 Plasma-Catalyst Assisted
5.3.1.3 Plasma Flight-Through Method
5.3.1.4 Direct Plasma Synthesis
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