Plasma Processing of Nanomaterials

9

Graphene Growth by Plasma-Enhanced Chemical Vapor Deposition (PECVD)

M. Meyyappan

Jeong-Soo Lee

CONTENTS

9.1    Introduction

9.2    Properties and Characterization

9.3    Applications

9.4    Graphene Preparation

9.5    Plasma-Enhanced Chemical Vapor Deposition (PECVD) of Graphene

Acknowledgments

References

9.1    Introduction

Low-temperature plasma processing has become a popular technique of choice among the nanotechnology community in the last decade to grow carbon nanotubes (CNTs) and inorganic nanowires, for attaching functional molecular groups to the surface of nanostructures, and chemisorption-based hydrogen storage in CNTs [1]. In the past, diamond, diamond-like carbon, carbon nanotubes, and carbon nanofibers [2] have been grown ...