December 2017
Intermediate to advanced
430 pages
13h 44m
English
Graphene Growth by Plasma-Enhanced Chemical Vapor Deposition (PECVD)
CONTENTS
9.2 Properties and Characterization
9.5 Plasma-Enhanced Chemical Vapor Deposition (PECVD) of Graphene
9.1 Introduction
Low-temperature plasma processing has become a popular technique of choice among the nanotechnology community in the last decade to grow carbon nanotubes (CNTs) and inorganic nanowires, for attaching functional molecular groups to the surface of nanostructures, and chemisorption-based hydrogen storage in CNTs [1]. In the past, diamond, diamond-like carbon, carbon nanotubes, and carbon nanofibers [2] have been grown ...