Plasma Processing of Nanomaterials

13

Selective Functionalization and Modification of Carbon Nanomaterials by Plasma Techniques

Yuhua Xue

Liming Dai

CONTENTS

13.1  Introduction

13.2  Plasma Techniques for Selective Functionalization of Carbon Nanomaterials

13.3  Plasma Techniques for Fabrication of Carbon Nanomaterials

13.3.1  Plasma Polymerization of Semiconducting Polymer Nanofilms

13.3.2  Plasma Patterning

13.3.2.1  Plasma Patterning of Conducting Polymers

13.3.2.2  Plasma Patterning of Carbon Nanotubes

13.3.3  Plasma Etching

13.4  Concluding Remarks

Acknowledgments

References

13.1  Introduction

Radio-frequency (RF) glow discharges are formed when an electric field at frequencies of kHz to GHz is applied to a gas at low pressure (<10 Torr).^1–3 In a glow discharge, excited ...