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Chapter 8
8.2.3 Micro-Electrical and Mechanical Systems
MEMS are component-level devices fabricated using semiconductor-like processes
(principally etching and plating) that allow for the three-dimensional “ sculpting ” of
silicon and numerous other materials [1] . Most MEMS devices have moving parts, but
this is not an absolute requirement. The resulting products are quite diverse, ranging
from sensors (inertial, pressure, fl ow, biological, chemical, and infrared) and actuators
(nozzles, pumps, valves, microphones, and switches) to other novel devices, such as lab-
on-a-chip and arrays of mirrors.
Most of the MEMS in ...