Printed thick-film piezoelectric and pyroelectric sensors
V. Ferrari, University of Brescia, Italy
The composition, structure and properties of piezoelectric and pyroelectric thick-films on ceramic and silicon substrates are surveyed. With particular focus on screen-printed films of ferroelectric ceramics in the family of lead zirconate titanate (PZT), applications in sensors and microsystems, actuators and energy harvesting are outlined and possible future trends delineated.
The introduction of printed piezoelectric and pyroelectric films in the second half of the 1980s was ...