Printed thick-film mechanical microsystems (MEMS)
S.P. Beeby, University of Southampton, UK
This chapter discusses the use of printed thick-films in mechanical microsystems or MEMS. It considers two types of microsystem, one based on silicon and the other on ceramic materials. Silicon is the most widely used material for MEMS, and there is a wide range of micromachining processes available to fabricate microstructures. Piezoelectric thick-films such as lead zirconate titanate (PZT) have been successfully printed on silicon but there are difficulties with interfacial reactions and compatibilities with some micromachining processes. Nonetheless, several thick-film MEMS have been realised in silicon and these are described ...