O'Reilly logo

Reference Data for Engineers, 9th Edition by Wendy M. Middleton, Mac E. Van Valkenburg

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

SINGLE-WAFER INTEGRATED DEVICE PROCESSING

This section presents an overview of various single-wafer fabrication techniques for integrated processing of microelectronic devices. Numerous processing modules, sensors, and associated fabrication processes have been developed for advanced semiconductor device manufacturing. Specific developments and results will be presented in the areas of rapid thermal processing (RTP), dry and vapor-phase surface cleaning, epitaxy, plasma processing, and in situ sensors.

Single-Wafer Semiconductor Manufacturing

The continuing demands for higher chip packing densities and enhanced system-level performance are the main technology and device scaling drivers. The high-performance processor and dense memory chips ...

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required