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Sensor Technologies for Civil Infrastructures, Volume 1 by Hoon Sohn, Jerome P. Lynch, Ming L. Wang

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10

Micro-electro-mechanical-systems (MEMS) for assessing and monitoring civil infrastructures

D. Ozevin,    University of Illinois at Chicago, USA

Abstract:

This chapter discusses the current state-of-the-art micro-electro-mechanical-system (MEMS) sensors specifically designed and implemented for structural health monitoring (SHM) of civil structures. The MEMS sensors have significant potential for advancing SHM methods because of diverse manufacturing capabilities, which allow integrating multiple sensing elements on the same device and on-chip electronics. The sensor types, which are commonly manufactured using micromachining methods, include accelerometer, acoustic emission sensor, strain, and corrosion sensor. The chapter first reviews the ...

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