10

Advanced Optical Incremental Sensors

Encoders and Interferometers

Suzanne J.A.G. Cosijns1, Maarten J. Jansen1, and Han Haitjema2     1ASML, Veldhoven, The Netherlands     2Mitutoyo Research Center Europe, Best, The Netherlands

Abstract

In this chapter the principles of displacement metrology by optical incremental sensors are given. First the basic concepts of displacement interferometer systems as well as their signal processing and error sources are reviewed. Then the concepts of optical encoder systems and some of their design considerations are discussed.

Keywords

Displacement interferometer; Imaging encoder; Interferential encoder

10.1. Introduction

Within the precision engineering and manufacturing industries, displacement laser interferometers ...

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