Smart Sensors and MEMS, 2nd Edition

Index

Note: ‘Page numbers followed by “f” indicate figures, “t” indicate tables’.

A

a-Si, See Amorphous silicon (a-Si)

Abbe correction, 282–283, 282f–283f

Abbe error, 258–259, 258f–259f

Absolute encoders, 264–265, 265f

Absolute minimization, 230–231

pass-through, 231, 237

Absolute position encoders, 264

Absolute sensing, 286–287

AC interferometer, 249–250

AC signals, See Alternating current signals (AC signals)

Acceleration

noise power density, 401–402

sensor, 306

Accelerometer, 49–50, 50f, 291, 302, 395

FM, 405–407, 406f

MEMS, 398–407

resonant, 391–392

Accuracy over temperature range and supply voltage range, 78–79, 78f

Acoustic actuation, 360

Acoustic MEMS array system (AMA system), 541–542

design process for, 544–545

implementation, 548–549

Acoustic sensor arrays ...