Smart Sensors and MEMS, 2nd Edition

S

S₉₀ signal, 248, 253–256

SACNS, See Super-aligned carbon nanotube sheets (SACNS)

Sampling noise, 67–68

SAR, See Successive-approximation-register (SAR)

SASA system, See Smart acoustic sensor array system (SASA system)

Saturation current density, 63

Sawtooth-like microactuator, 328

Scanning electron microscope images, 336–338, 338f–339f

Scattering, 223

Schmitt trigger (ST), 33

Scientific revolutions, 2

Scratch drive actuator (SDA), 317–318, 327–328, 328f

SDMA, See Soft direct memory access (SDMA)

Segmented meanders zipper actuators, 328

Seismic mass, 401–402

Self-calibrating device, 6–7

Self-diagnosing device, 6–7

Self-mixing effect, 118–119, 118f

Self-recovery, 16

Self-resonance frequency (SRF), 124–127, 126f–127f

Self-validating device, 6–7

Self-validation, 15 ...