a divergent fan to the plane of the field stop positioned in
the focal plane of the eyepiece. Here the fans overlap and
interfere. The resulting fringe pattern with a constant
spacing, d
0
, constitutes an image of the initial grating of
the object plane and both are related through the system
magnification: d
0
/d ¼ V.
To create the fringe pattern at least two divergent
beams and therefore two diffraction orders must be
present simultaneously in the aperture stop. The location
of the diffraction maxima, F
i
, in the focal plane of the
objective is dictated by the diffraction grating equation
(Eq. (5.18); see Chapter 5): sin u
ðiÞ
max
¼ i
l
=d for i ¼ 0,
1, 2,. The aperture stop size, D
as
, is related to the
numerical aperture of the system in the object space:
n sin u
max
¼ D
as
=ð2f
0
Þ. These last two expressions allow
one to find the minimum diffraction spacing, d, which
can be imaged by the microscope.
Two possible methods of illumination should be con-
sidered separately: direct illumination when the zero-
order diffraction is focused in a point on the optical axis
and oblique illumination when the fo cus of the zero-
order diffraction is located in an off-axis point. Fig. 1.2.25
illustrates both situations. The limiting condition for
direct illumination requires that the zero-order maxi-
mum as well as the 1
st
and the ( 1)
st
order maxima are
inside the aperture stop whereas the corresponding limit
for oblique illumination can be realized if the zero-order
and only one of the first-order diffraction maxima are
inside the circle of diameter D
as
. As can be seen, the
limiting resolution is related to the numerical aperture
(NA) of the system as
d ¼
l
n sin u
max
¼
l
NA
; d ¼
l
2n sin u
max
¼
l
2NA
;
(1.2.35)
for direct (on-axis) and oblique illumination, re-
spectively. In the real practice of microscopy illumination
is supplied by a wide-angle condenser coming at both
direct and oblique directions. It can be shown that in
such a case the limiting resolution of the microscope is
determined as
d ¼
l
NA þ NA
C
; (1.2.36)
where NA
C
is the numerical aperture of the condenser.
Problems
P.1.2.15. Find the minimum required active diameter of
the well-correcte d imaging optics for visible wavelengths
operating at a working distance of 30 mm and providing
a resolution of 0.5 mm.
P.1.2.16. A microscope for the visible range is sup-
plied with three objectives: 10 0.25 NA, 40 0.65
NA, and 100 1.2 NA, and a condenser of 0.96 NA.
Find the maximum resolution in all three possibl e
configurations.
P.1.2.17. A microscope objective of magnification 10
has a focal length of 16 mm and is operated with an ap-
erture stop of 5 mm diameter. At which angle of oblique
illumination should one expect the resolution to be twice
that of normal (on-axis) illumination? Which resolution
(in the visible) will be available in this case and how will
the resolution be changed if the illumination angle is
held at 5
?
1.2.3 Image evaluation
Evaluation of images is carried out (i) at the design stage
when it is check ed whether the configuration designed is
capable of delivering the system performance re-
quirements; and (ii) at the end of manufacturing when
a real system with all the tolerances of component fab-
rication and assembling is aligned and prepared for final
testing. Image evaluation at the design stage is performed
theoretically, by analyzing aberrations of the system and
also by calculating some integral parameters enabling one
to estimate the expected image quality. Image evaluati on
at the manufacturing stage is done with special hardware
allowing one to measure resolution, contrast, and other
parameters rel ated to the system performance, usually
determined in a procedure specific for each tested
architecture.
Theoretical evaluation of image quality is usually
based on ray tracing of a great number of rays, originating
in on-axis and off-axis points of the object and, if nec-
essary, related to several representative wavelengths
(mostly, the lines C, D, and F) of the illuminating radi-
ation. Obviously computing is carried out with special
software allowing one to calculate and display the loca-
tion of the rays in the image plane (a spot diagram),
energy distribution in a spot, frequency response of the
system (modulation transfer function, see below), posi-
tion of the best focus, and other useful parameters.
Diffraction effects are also taken into account while
Fig. 1.2.25 Location of diffraction maxima in an aperture stop: (a)
on-axis illumination; (b) oblique illumination.
36
SECTION ONE Optical Theory

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