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Thin-film PZT-based transducers

M.K. Kurosawa,     Tokyo Institute of Technology, Japan

Abstract:

The miniaturization of ultrasonic actuators and sensors uses a deposition process for the fabrication of the piezoelectric film. The hydrothermal deposition process is suitable for the fabrication of these devices: it involves low reaction temperatures, is carried out in solution, selfpolarization occurs and no annealing is required. Devices fabricated using hydrothermal PZT film deposition have high-intensity vibration capabilities, which is beneficial for actuator applications. The fabrication and analysis of an ultrasonic micro-motor, a touch-probe sensor and an ultrasonic micro-scalpel that operate using the transverse-mode d31 effect are ...

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