Thin-film PZT-based transducers
M.K. Kurosawa, Tokyo Institute of Technology, Japan
The miniaturization of ultrasonic actuators and sensors uses a deposition process for the fabrication of the piezoelectric film. The hydrothermal deposition process is suitable for the fabrication of these devices: it involves low reaction temperatures, is carried out in solution, selfpolarization occurs and no annealing is required. Devices fabricated using hydrothermal PZT film deposition have high-intensity vibration capabilities, which is beneficial for actuator applications. The fabrication and analysis of an ultrasonic micro-motor, a touch-probe sensor and an ultrasonic micro-scalpel that operate using the transverse-mode d31 effect are ...