Thin-film PZT-based transducers
M.K. Kurosawa, Tokyo Institute of Technology, Japan
Abstract:
The miniaturization of ultrasonic actuators and sensors uses a deposition process for the fabrication of the piezoelectric film. The hydrothermal deposition process is suitable for the fabrication of these devices: it involves low reaction temperatures, is carried out in solution, selfpolarization occurs and no annealing is required. Devices fabricated using hydrothermal PZT film deposition have high-intensity vibration capabilities, which is beneficial for actuator applications. The fabrication and analysis of an ultrasonic micro-motor, a touch-probe sensor and an ultrasonic micro-scalpel that operate using the transverse-mode d31 effect are ...
Get Ultrasonic Transducers now with the O’Reilly learning platform.
O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.
